Semiconductor technology

Semiconductor technology

Semiconductor system technology - wafer handling and testing

Wafer handling and testing

We develop and manufacture system solutions for the semiconductor industry, taking into account the special requirements in the clean room. As well as supplying standard products, we also solve the customers' specific handling assignments. We currently have hundreds of systems which have been successfully positioned on the market. We always develop our solutions by working closely with the customer. In the process, the focus is on quality, function and cost-efficiency.

Specially developed products for positioning in the clean room

Linear actuators for clean room use

RK Duoline Clean: Linear actuators for the clean room with either ball screw drive (rear) or toothed belt drive (front)

Specially developed products for positioning in the clean room

RK Rose+Krieger has optimised its RK Duoline profile linear unit for use in clean rooms and supplies spindle and belt-driven RK Duoline Clean linear units, with or without vacuum connection, in the common sizes 60 and 80. A total of eight different versions were successfully tested in accordance with EN ISO 14644-1 and were awarded clean room certification in the globally recognised classes 1 (RK Duoline Clean 60 SU with vacuum connection at 0.5 m/s) to 5 (RK Duoline Clean 80 Z without vacuum connection at 0.5 m/s). All the requisite clean room suitability tests were conducted at the Fraunhofer Institute for Manufacturing Engineering and Automation (IPA) in Stuttgart.

Clean room production is an essential aspect of the manufacturing process for industries such as the semiconductor industry, photovoltaics, microelectronics, aerospace technology and the automotive industry. Naturally the requisite clean room classifications vary as a result.

RK DuoLine clean brochure
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Spindle axis CAD data Toothed belt CAD data
Lifting column for the clean room field

Multilift II clean, the electrical lifting column for the clean room – IPA-certified for class 4 according to DIN EN ISO 14644-1

Multilift II clean, the lifting column for the clean room field

The requirement for manufacturing products under clean conditions is gaining in significance in various sectors. Equipment in clean rooms is in particular required to feature minimum particle emission. Even the tiniest particles can cause product contamination and thus, for example, lead to malfunctions. Despite an increasing level of automation in individual process steps, countless production activities are still carried out by employees who require ergonomically designed workstations, including in the clean room. Electrically driven lifting columns make a considerable contribution in this area.

That is why RK Rose+Krieger has optimised the drive used for its Multilift II lifting column in order to reduce the emission of particles from the lifting column to a minimum, making them suitable for use in the clean room.

This lifting column gained its certification as suitable for clean room use in a particle emission test according to DIN EN ISO 14644-1, carried out by the Fraunhofer Institute for Manufacturing Engineering and Automation IPA. As a result, the IPA certified the lifting column for use in clean rooms up to the globally recognised class 4

Mulitilift II clean brochure
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Multilift II CAD data